INFRARED LENSES FOR ABSORPTION IMAGING SPECTROSCOPY

NIST-FY25-CHIPS-0094

6695 / 334516

Title:  Infrared lenses for absorption imaging spectroscopy

BACKGROUND

The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing. 

The Digital Twins for Atomic Layer Deposition Processes Project (5.05) was undertaken to develop and validate digital twin models for atomic layer deposition processes to help facilitate efficient design and operation of these processes. One aspect of this project involves development and application of in situ optical diagnostics capable of quantifying precursor chemical concentrations at different locations in a deposition tool, in both one and two dimensions. One optical technique that will be employed is mid-infrared (IR) gas-phase absorption imaging. For one implementation of this technique, Group 646.05 must procure mid-IR lenses to record images of molecular absorptions by precursor chemicals. These lenses must be designed for use with cooled mid-IR cameras that incorporate a cold stop in the optical train. Lenses are needed with short and moderate focal lengths to permit use at different locations in the tool with different characteristic dimensions. Furthermore, since different precursor compounds will be investigated, lenses that are optimized for two different IR wavelength ranges are needed: the mid-wave IR (MWIR) and long-wave IR (LWIR) spectral regions. Therefore, 646.05 needs to purchase four (4) separate lenses, each optimized for operation at a short or moderate focal length and in the MWIR and LWIR spectral range.

Minimum Requirements

All items must be new.  Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.  The use of “gray market” components not authorized for sale in the U.S. by the proposer is not acceptable.   All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Technical Specifications:

The Contractor shall provide a system that meets all technical specifications identified below. All items must be new.  Used or remanufactured equipment will not be considered for award. Experimental, prototype, or custom items will not be considered.  The use of “gray market” components are not acceptable.  All line items shall be shipped in the original manufacturer’s packaging and include all original documentation and software, when applicable.

Line Item 0001:  Short focal length mid-wave IR lens

Description:  The characteristics of this lens must be matched to a particular cooled infrared camera, this lens must have a short focal length, and this lens must be optimized for operation in the mid-wave IR spectral region.

Quantity: One (1)

1. Technical Specifications
   1. Wavelength range of operation:  a wavelength of 3 microns or shorter to a wavelength of 5 microns or longer
   2. In-band Transmission:  >90%
   3. Focal length:  25 mm
   4. f-number:  between f/2.0 and f/2.5
   5. Minimum object distance:  200 mm or less
   6. Image diagonal:  21 mm or larger
   7. Circular field of view:  40 degrees or greater
   8. Stop location:  25.4 mm from sensor (must match cold stop position of camera)
   9. Back Working Distance:  33.1 mm (front of camera housing to sensor)
   10. Mounting:  must be compatible with the camera (possibly either Infrared Bayonet mount or 4x #6-32 screws on a 2.63 inch bolt hole)
   11. Focus:  manual

Line Item 0002:  Moderate focal length mid-wave IR lens

Description:  The characteristics of this lens must be matched to a particular cooled infrared camera, this lens must have a moderate focal length, and this lens must be optimized for operation in the mid-wave IR spectral region.

Quantity: One (1)

1. Technical Specifications
   1. Wavelength range of operation:  a wavelength of 3 microns or shorter to a wavelength of 5 microns or longer
   2. In-band Transmission:  >90%
   3. Focal length:  50 mm
   4. f-number:  between f/2.0 and f/2.5
   5. Minimum object distance:  500 mm or less
   6. Image diagonal:  21 mm or larger
   7. Circular field of view:  20 degrees or greater
   8. Stop location:  25.4 mm from sensor (must match cold stop position of camera)
   9. Back Working Distance:  33.1 mm (front of camera housing to sensor)
   10. Mounting:  must be compatible with the camera (possibly either Infrared Bayonet mount or 4x #6-32 screws on a 2.63 inch bolt hole)
   11. Focus:  manual

Line Item 0003:  Short focal length long-wave IR lens

Description:  The characteristics of this lens must be matched to a particular cooled infrared camera, this lens must have a short focal length, and this lens must be optimized for operation in the long-wave IR spectral region.

Quantity: One (1)

1. Technical Specifications
   1. Wavelength range of operation:  a wavelength of 8 microns or shorter to a wavelength of 12 microns or longer
   2. In-band Transmission:  >90%
   3. Focal length:  25 mm
   4. f-number:  between f/2.0 and f/2.5
   5. Minimum object distance:  200 mm or less
   6. Image diagonal:  21 mm or larger
   7. Circular field of view:  40 degrees or greater
   8. Stop location:  25.4 mm from sensor (must match cold stop position of camera)
   9. Back Working Distance:  33.1 mm (front of camera housing to sensor)
   10. Mounting:  must be compatible with the camera (possibly either Infrared Bayonet mount or 4x #6-32 screws on a 2.63 inch bolt hole)
   11. Focus:  manual

Line Item 0004:  Moderate focal length long-wave IR lens

Description:  The characteristics of this lens must be matched to a particular cooled infrared camera, this lens must have a moderate focal length, and this lens must be optimized for operation in the long-wave IR spectral region.

Quantity: One (1)

1. Technical Specifications
   1. Wavelength range of operation:  a wavelength of 8 microns or shorter to a wavelength of 12 microns or longer
   2. In-band Transmission:  >90%
   3. Focal length:  50 mm
   4. f-number:  between f/2.0 and f/2.5
   5. Minimum object distance:  500 mm or less
   6. Image diagonal:  21 mm or larger
   7. Circular field of view:  20 degrees or greater
   8. Stop location:  25.4 mm from sensor (must match cold stop position of camera)
   9. Back Working Distance:  33.1 mm (front of camera housing to sensor)
   10. Mounting:  must be compatible with the camera (possibly either Infrared Bayonet mount or 4x #6-32 screws on a 2.63 inch bolt hole)
   11. Focus:  manual

HOW TO RESPOND TO THIS NOTICE

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QUESTIONS REGARDING THIS NOTICE

Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received by 12:00 p.m. Eastern Time on July 21, 2025.  Questions will be anonymized and answered via sources sought notice amendment following the question submission deadline.

IMPORTANT NOTES

The information received in response to this notice will be reviewed and considered so that the NIST may appropriately solicit for its requirements in the near future. 

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