LITHIUM NIOBATE ETCHING

SLAC National Accelerator Laboratory is operated by Stanford University for the Department of Energy.  As a management and operating contractor, subcontracts awarded by the Laboratory are not Federal procurements, and are not directly subject to the Federal Acquisition Regulations in 48 CFR. Nonetheless, certain Federal laws, Executive Orders, and regulations may affect our DOE approved purchasing system, as required by statute, regulation, or contract terms and conditions.

This is a formal request for quotation from Procurement as requirement has been assigned to me as a buyer.

**Please do not contact the requester regarding the item(s) in this request while we are in the process of bidding to maintain the integrity of this solicitation.

AMENDMENT 02

The following Addendum 02 is being issued for including technical details to technical evaluation criteria.

Please refer to the additional information in red that was added.

The subcontractor needs to be capable of fabricating apertures with dimensions of 1 µm x 120 µm in the LiNbO3 layer of SLAC-supplied X-cut LiNbO3 on insulator (LNOI) wafers with arrays of slits with widths of 0.35um, 0.5um, 1um, 5um, and 10um on each chip. The LNOI wafers have LiNbO3 thicknesses less than 1µm, SiO2 thicknesses of 2 µm, and Si handler thicknesses of 525 µm. The LNOI wafers are 4” in diameter.

This Addendum modifies the Request for Quotation and must be acknowledged. Failure to acknowledge all addenda could make your proposal non-responsive. Please confirm that the submitted proposal is not changed because of this addendum. If proposal sent is revised because of this, please submit the revised proposal. 

The following changes are herby made to the appropriate documents contained the above-mentioned Request for Quotation (RFQ). All other terms and conditions of the RFQ remain the same. Thank you.

Anthony Chin

Procurement Commodities Team

anthonyc@slac.stanford.edu

SLAC National Accelerator Laboratory

2575 Sand Hill Road

Menlo Park, CA 94025

AMENDMENT 01

The following addendum 01 is being issued for the subject request for Quotation: 358965_Lithium Etching Questions.

Answers to question in red"

1. Would you please let us know the number of chips that need to be fabricated and delivered?

I would need at least 5 chips of the 5 mm x 10 mm size that I described, and each chip would need to contain a several of the slots given in my description.

This addendum modifies the Request for Quotation and must be acknowledged. Failutre to acknowledge all addenda could make your proposal non-responsive. Please confirm that the submitted proposal is not changed because of this addendum. If proposal sent is revised because fo this, please submit the revised proposal.

The following changes are heby made to the approrpiate documents contained the above-mentioned Request for Quotation (RFQ). All other terms and conditions of the RFQ remain the same.

Thank you.

Best,

Anthony Chin

Procurement Commodities Team

anthonyc@slac.stanford.edu

SLAC National Accelerator Laboratory

2575 Sand Hill Road

Menlo Park, CA 94025

Please review the quote and provide your best and final offer for both price and lead-time.

Kindly also have the quotation revised to today’s date and address the quote to my attention.

The follow has been attached for you to complete and review:

1. (BAA) Buy American Act Certification
2. Representations & Certifications Rider
3. Confirm Attached SLAC terms are accepted: FP Commercial Supplies-Services T&Cs (August 2023)

Required item(s) listed below:

1. Qty: 1 - product description: Lithium Niobate Etching 

Quote is for product only; no on-site services permitted.

Source selection will be based on Lowest Price and Technically Acceptable Method (LPTA).

Technical evaluation criteria are as follows:

1. Ability to meet the following specs:

The subcontractor needs to be capable of fabricating apertures with dimensions of 1 µm x 120 µm in the LiNbO3 layer of SLAC-supplied X-cut LiNbO3 on insulator (LNOI) wafers. The LNOI wafers have LiNbO3 thicknesses less than 1µm, SiO2 thicknesses of 2 µm, and Si handler thicknesses of 525 µm. The LNOI wafers are 4” in diameter.

The subcontractor needs to be capable of fabricating apertures on the order of 300 µm x 400 µm dimensions in the SiO2 and Si layers of the LNOI wafers described above.

The LiNbO3 active layer containing the 1 x 120 µm rectangular aperture (described above) must be free-standing over a given 300 µm x 400 µm aperture.

The short axis of the 1 x 120 µm apertures in the LiNbO3 active layer must be parallel with the Z-axis of the X-cut LiNbO3 layer.

The final chips need to contain arrays of the apertures described above and must be cut to dimensions of either 5 mm x 10 mm or 10 mm x 10 mm.

Please provide a price and lead time quotation by COB 9/17/2025. (15 days)

Please be advised that the requirement was also posted on SAM.gov.

Send quote to AnthonyC@SLAC.stanford.edu.

 

The bid closing date for this requirement is 9/17/2025.

Is there any room for additional discount such as for Academic, ICPT, GSA, or Government Institutions?

If possible, please provide a link to your webpage for published price list to substantiate for the prices quoted.

• Buy American Act Certification (BAA) applies to awards that are over $10,000.
• Representations & Certifications Rider is required. Once completed the Reps and Certs is valid for one year until renewal. If you have already completed one within the year please disregard. Otherwise, please complete and return.
• All subcontractors are required to register in the System for Award Management (www.sam.gov).
• The resulting purchase order will be issued on a fixed price basis. SLAC National Accelerator Laboratory Terms and Conditions for Fixed Price Commercial Supplies and Services (Rev. August 2023) will be made a part of the resulting order.
• Payment Terms will be NET-30
• Freight terms will be FOB Destination Prepaid and Add
• For foreign vendors: Shipment will be made CIP SLAC, Menlo Park, and Duty Unpaid

You are requested to mark and identify proprietary/confidential information provided in response to the solicitation.

Contact me directly with any questions.

Kind regards,

Anthony Chin

Procurement Commodities Team

anthonyc@slac.stanford.edu

SLAC National Accelerator Laboratory

2575 Sand Hill Road

Menlo Park, CA 94025